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Width of Slit
w

Length of Capillary
L　

Tolerance of w

Tolerance of l,r,d,h,a

Tolerance of L

Special

Precision

Special

Precision

Special

Precision

0.04-0.06
0.06-0.10
0.10-0.20
≥ 0.20

≤ 5.0W
≤ 10.0W
≤ 20.0W
≤ 30.0W

± 0.002
± 0.002
± 0.002
± 0.002

± 0.003
± 0.003
± 0.003
± 0.003

± 0.015
± 0.015
± 0.015
± 0.015

± 0.025
± 0.025
± 0.025
± 0.025

± 0.002
± 0.002
± 0.002
± 0.002

± 0.003
± 0.003
± 0.003
± 0.003